Automation Control Solution for Semiconductor Coating Equipment
Automation Control Solution for Semiconductor Coating Equipment
Case Background:
In the semiconductor industry, coating machines are essential in the photolithography process, responsible for applying photoresist or other functional materials onto wafers or substrates. Using spin coating or spray coating methods, these machines form uniform and stable thin films to ensure patterning accuracy. Advanced coating equipment is equipped with precise thickness control, excellent uniformity performance, and high-accuracy positioning systems. They often feature automated loading/unloading arms and real-time feedback control systems to enhance production efficiency and ensure consistent coating quality.
Solution:
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Main Controller: OMRON PLC
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Applicable Process: Coating
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Project I/O Configuration: MTC-EEC-A-2-A16-L-10-08-S-D + MTC-200H-D*2
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Annual Usage: 1 million sets
In this project, the customer integrates an OMRON PLC with Decowell’s MTC valve island products to build a compact and efficient pneumatic control system for coating equipment. Solenoid valves drive cylinders to precisely control the spray nozzle's vertical and horizontal movement, ensuring accurate coating height and position. Additional cylinders drive the automatic loading and unloading arms, which transport substrates between the coater and the conveyor system.
The system incorporates I/O modules within the valve island, enabling easy connection of position sensors and magnetic switches. This design reduces wiring complexity and enhances maintainability. With modular architecture, the system offers excellent scalability and flexibility to meet different equipment configurations.
Application Advantages:
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High integration reduces wiring and saves panel space
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Expandable I/O modules for future system upgrades
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Accurate motion control for spray nozzles and handling arms
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Stable, efficient performance suitable for high-volume production